IS02–Numerical Simulation of Optical Through-Silicon Waveguide for 3D Photonic Interconnections

Optical interconnections are a promising step forward to overcome the intrinsic limitations of electrical interconnections in integrated circuits. In this work, we present a finite element method (FEM) simulation study of a dielectric waveguide etched through the full thickness of a silicon substrate. In particular, it is investigated the effect of the bridge-to-core size ratio on the first two supported modes. Then, the influence of the waveguide sidewalls tapering angle on the three-dimensional beam propagation is studied. Such optical through-silicon waveguide (OTSW), if non-adiabatically tapered can provide effective mode size conversion and favour the coupling of external light sources to photonic integrated circuits.

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