IS14pd–Real-time Thickness Measurement with a Modified Sagnac Interferometer Using Phase Shift Technique
The modified Sagnac interferometer with a phase-shift approach is given here for measuring Ta2O5 thin-film thickness. The input light is split into reference and sample beams. A real-time signal measurement is performed to get the output intensities of both beams with four different polarizer settings. These intensities can then be effectively converted into film thickness.
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